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Aluminum Etchants, TYPE D, 2Gallons
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Aluminum Etchants, TYPE D, 2Gallons
Product name Product No. Properties Unit Lead time
Aluminum Etchants, TYPE D

Synonyms : 알루미늄 에천트
TYPE D 최소구매수량 : 1Gallon * 2EA

Description

Standard aluminum etchant for use on gallium arsenide, arsenide and gallium phosphide devices and for aluminum metallizations on nichrome resistors. Nitric acid-free.

1. How do I increase the etch rate?
1) The rate will approximately double with every 10°C increase in temperature.
2) Increase the rate of stirring or agitation.

2. How do I reduce the etch rate?
1) Adding 1 part deionized water to 2 parts etchant will reduce the etch rate approximately 50%.

3. Do I need to dilute the etchant?
1) No, it is ready to use.

4. How do I reduce undercutting?
1) Increase the rate of stirring or agitation.

Appearance : Water-white to light yellow
pH : Strongly acidic
Etch Rate at 25°C : 40 Å/sec
Etch Rate at40°C : 125Å/sec
Etch Capacity (rate declines at ~70%) : 60 g/gallon
Shelf Life : 1 year
Storage Conditions : Ambient
Filtration : 0.2 um
Recommended Operating Temperatures : 20-80oC (30-40oC most common)
Rinse : Deionized water; may be followed by alcohol rinse if desired.
Photoresist Recommendations : KLT 6000 Series, TRANSIST, PKP-308PI
Select Compatible Materials : Silicon oxide, gold
Select Incompatible Materials : Aluminum oxide, silicon nitride
Compatible Plastics : HDPE, PP, Teflon, PFA, PVC

APPLICATION

Aluminum metallizations up to 25,000 Å are vacuum deposited on the silicon slice, coated with a photoresist, and UV exposed using an appropriate photographic mask. The resist is developed to protect the aluminum where interconnections are desired. Then the unprotected areas of the aluminum are removed by etching with Transene Aluminum Etchant, followed by a water rinse.

Etching time is dependent upon the etchant temperature and the aluminum film thickness. When etching thick aluminum films, a higher etch rate is required; thus a higher etchant temperature should be used. Likewise, for thinner aluminum films, slower etch rates are desired and a lower etchant temperature should be chosen.
2Gallons 2 weeks after order
 
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